Acoustic phonon tunneling in LiNbO3
In this thesis, the patterning techniques of lithium-niobate-on-insulator silicon chips were investigated to create free-standing membrane platforms of LiNbO3 (lithium niobate) that are separated by a submicron gap for cryogenic acoustic phonon tunneling measurements. A three-layer mask of mr-PosEBR...
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| Other Authors: | , , , , , |
| Format: | Master's thesis |
| Language: | eng |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://jyx.jyu.fi/handle/123456789/95982 |