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[{"key": "dc.contributor.advisor", "value": "Korpelainen, Virpi", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.advisor", "value": "Apaja, Vesa", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Nysten, Johan", "language": "", "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2019-02-19T06:26:21Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2019-02-19T06:26:21Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2019", "language": "", "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/62847", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Nanometrin skaalan pituus-mittaukset pohjautuvat j\u00e4ljitett\u00e4vyyteen, ja SI-j\u00e4rjestelm\u00e4n\nmetriin. Atomivoimamikroskooppeja (AFM) k\u00e4ytet\u00e4\u00e4n pintojen mittaukseen alle\nnanometrin erottelukyvyll\u00e4. Metrologiset AFM:t (MAFM:t) k\u00e4ytt\u00e4v\u00e4t interferometrej\u00e4\npaikan m\u00e4\u00e4ritykseen, jolloin pinta-mittauksen ovat suoraan j\u00e4ljitett\u00e4vi\u00e4.\nMIKES MAFM jatkokehitettiin EMPIR-aloitteen 3DNano-projektin puitteissa. T\u00e4ss\u00e4\ngradussa laitteen suurimmat ep\u00e4varmuuden l\u00e4hteet kartoitettiin ja mallinnettiin.\nJ\u00e4rjestelm\u00e4\u00e4 kuvaava malli kehitettiin Matlab:illa. J\u00e4rjestelm\u00e4n mallin avulla laskettiin,\nMonte Carlo\u2013menetelm\u00e4\u00e4 k\u00e4ytt\u00e4en, 3D kordinaatiston ep\u00e4varmuudet. Joitain\nep\u00e4varmuuden l\u00e4hteit\u00e4 ei mallinnettu, mutta n\u00e4it\u00e4 tarkasteltiin silti laadullisesti.\nAlustavat tulokset laskettiin ohjelmallisesti tuotetulle 2D hilarakenteelle, 1 \u00d7 105\nMonte Carlo \u2013iteraatiolla. Lasketut ep\u00e4varmuudet j\u00e4iv\u00e4t nm-suuruusluokkaan. J\u00e4rjestelm\u00e4n\nmallin kehitys tulee jatkumaan, jolloin tavoitteeksi tulee mittasuureen\nep\u00e4varmuuden laskeminen, esim. hilan jaksolle tai askelkorkeudelle.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Traceability to the SI metre is the basis for dimensional measurements in the nanometer\nscale. Atom Force Microscopes (AFMs) are used to measure surface features\nwith subnanometre resolution. Metrological AFMs (MAFMs) use interferometers for\npositioning, making surface measurements directly traceable. The MIKES MAFM\nwas further developed under the EMPIR initiative\u2019s 3DNano project. The device\u2019s\nlargest uncertainty sources were characterized and modeled as part of this thesis,\nand used to construct a system model in Matlab. Evaluating the system model using\na simple Monte Carlo method gives us the standard uncertainty components for 3D\npositioning. Some uncertainty sources, such as interferometer target mirror flatness,\nwere qualitatively analyzed but not modeled. Preliminary results were generated\nusing surface points of computer-generated 2D lattice, and 1 \u00d7 105 Monte Carlo\ntrials. The computed uncertainties were all in the nm range. Development of the\nmodel will continue, with the goal of evaluating uncertainty for a measurand such as\ngrating pitch or step height.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2019-02-19T06:26:21Z\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2019-02-19T06:26:21Z (GMT). No. of bitstreams: 0\n Previous issue date: 2019", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "64", "language": "", "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.title", "value": "Characterization and Monte Carlo evaluation of positioning uncertainty of an MAFM", "language": "", "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201902191567", "language": "", "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Soveltava fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Applied Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "yvv.contractresearch.collaborator", "value": "public", "language": "", "element": "contractresearch", "qualifier": "collaborator", "schema": "yvv"}, {"key": "yvv.contractresearch.funding", "value": "10000", "language": "", "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": 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"ep\u00e4varmuus", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "pinnat", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "metrology", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "measurement", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "uncertainty", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "surfaces", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": 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