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[{"key": "dc.contributor.author", "value": "Konttinen, Mikko", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2014-01-07T04:33:54Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2014-01-07T04:33:54Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2013", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.other", "value": "oai:jykdok.linneanet.fi:1290812", "language": null, "element": "identifier", "qualifier": "other", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/42757", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Entist\u00e4 pienemm\u00e4t puolijohderakenteet vaativat analyysity\u00f6kaluilta eritt\u00e4in hyv\u00e4\u00e4 herkkyytt\u00e4, jonka on my\u00f6s kehitytt\u00e4v\u00e4 rakenteiden vaatimusten mukaisesti -- muussa tapauksessa kehitys voi hidastua hyvin paljon ilman kunnollista tietoa valmistusmenetelmien tuloksista. Yksi oleellinen osa rakenteiden analysoimisessa on tieto seostusatomien ja varauksenkuljettajien pitoisuuksista rakenteen syvyyssuunnassa, eli syvyysjakauma. Vuosikymmeni\u00e4 syvyysjakauman mittaukseen on k\u00e4ytetty levi\u00e4misvastusmittausta (SRP, engl. Spreading Resistance Profiling), ja nelipisteanturimittausta (4PP, engl. Four Point Probe) on k\u00e4ytetty kuvaamaan koko syvyysjakauman vaikutusta s\u00e4hk\u00f6isess\u00e4 kontaktissa. Molempien tekniikoiden mittausherkkyydet ovat oleellisesti riippuvaisia antureiden koosta.\n\n T\u00e4ss\u00e4 ty\u00f6ss\u00e4 verrataan mikrokokoistettujen SRP- ja 4PP-tekniikoiden -- M2PP ja M4PP -- tuloksia toisiinsa ja perinteiseen SRP-tekniikkaan. M4PP-anturi on niin pieni kooltaan, ett\u00e4 my\u00f6s sill\u00e4 voidaan mitata syvyysjakauma. Viidest\u00e4 erilaisesta, korkeasti seostetusta ja ohuesta germanium-puolijohderakenteesta mitattiin vastussyvyysjakaumat, jonka pohjalta osasta laskettiin my\u00f6s varauksenkuljettajien syvyysjakaumat. M2PP-mittaukset olivat ensimm\u00e4isi\u00e4 SRP-mittauksia k\u00e4ytt\u00e4en M4PP-anturia, ja ne sek\u00e4 M4PP-mittaukset suoritettiin k\u00e4ytt\u00e4en Imec-tutkimuslaitoksen MicroRSP M-150 -mittauslaitetta (Capres A/S). M4PP-mittauksissa k\u00e4ytettiin 1,5- ja 10 \u00b5m-antureita, kun taas M2PP-mittauksissa ainoastaan 10 \u00b5m-anturia.\n \n\nMittaustulosten perusteella M2PP- ja M4PP-antureiden koolla on merkityst\u00e4. M2PP-mittauksissa esiintyv\u00e4st\u00e4 kohinaongelmasta huolimatta mittaukset olivat huomattavasti herkempi\u00e4 perinteisen SRP-mittaukseen verrattuna. M4PP-tekniikalla saadut tulokset olivat samanlaisia kuin vastaavat SRP-tekniikan tulokset, mutta mittauksen suoritus ja sen analysointi olivat huomattavasti helpompia ja yksinkertaisempia suorittaa. N\u00e4iden lis\u00e4ksi mittauksissa tuli esille viitteit\u00e4 germaniumin pintatilojen tunnetusta ja suuresta merkityksest\u00e4. Pintatilojen vaikutus voi huomattavasti hankaloittaa analysointia molempien tekniikoiden tapauksessa.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted using Plone Publishing form by Mikko Konttinen (mipekont) on 2014-01-07 04:33:53.616936. Form: Pro gradu -lomake (1 tekij\u00e4) (https://kirjasto.jyu.fi/julkaisut/julkaisulomakkeet/pro-gradu-lomake-1-tekijae). JyX data:", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by jyx lomake-julkaisija (jyx-julkaisija@noreply.fi) on 2014-01-07T04:33:54Z\nNo. of bitstreams: 2\nURN:NBN:fi:jyu-201401071024.pdf: 2486051 bytes, checksum: f0f62bdbb6db0c4e477862300890f85b (MD5)\nlicense.html: 4979 bytes, checksum: 4793c08ceae39417e061aeb2a3a89902 (MD5)", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2014-01-07T04:33:54Z (GMT). No. of bitstreams: 2\nURN:NBN:fi:jyu-201401071024.pdf: 2486051 bytes, checksum: f0f62bdbb6db0c4e477862300890f85b (MD5)\nlicense.html: 4979 bytes, checksum: 4793c08ceae39417e061aeb2a3a89902 (MD5)\n Previous issue date: 2013", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "1 verkkoaineisto (67 sivua)", "language": null, "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "fin", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "levi\u00e4misvastusmittaus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "levi\u00e4misvastus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "nelipisteanturimittaus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "neli\u00f6vastus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "SRP", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "4PP", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "M2PP", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "M4PP", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "spreading resistance profiling", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "four point probe", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "syvyysjakauma", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "varauksenkuljettajien syvyysjakauma", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Mikrokokoistetut levi\u00e4misvastus- ja nelipisteanturimittaukset puolijohderakenteen varauksenkuljettajien syvyysjakaumien m\u00e4\u00e4ritt\u00e4misess\u00e4", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201401071024", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": 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