Lithographic patterning by an atomic force microscope
Main Author: | |
---|---|
Format: | Licentiate thesis |
Language: | eng |
Published: |
[Jyväskylä] :
[1995]
|
Series: | Laboratory report / Department of Physics, University of Jyväskylä,
1995, 3. |
Online Access: | https://jyu.finna.fi/Record/jykdok.570876 |
Description not available. |