Lithographic patterning by an atomic force microscope
| Main Author: | |
|---|---|
| Format: | Licentiate thesis |
| Language: | eng |
| Published: |
[Jyväskylä] :
[1995]
|
| Series: | Laboratory report / Department of Physics, University of Jyväskylä,
1995, 3. |
| Online Access: | https://jyu.finna.fi/Record/jykdok.570876 |
| Description not available. |