Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching

Bibliographic Details
Main Author: Lindell, Anssi, kirjoittaja
Format: Doctoral dissertation
Language:eng
Published: [Jyväskylä] : 2022.
Series:Research report / Department of Physics, University of Jyväskylä, 2000, 8.
Subjects:
Online Access:JYX-julkaisuarkisto / JYX Digital Archive