Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
Main Author: | |
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Format: | Doctoral dissertation |
Language: | eng |
Published: |
[Jyväskylä] :
2022.
|
Series: | Research report / Department of Physics, University of Jyväskylä,
2000, 8. |
Subjects: | |
Online Access: | JYX-julkaisuarkisto / JYX Digital Archive |
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Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
Published 2000
JYX-julkaisuarkisto / JYX Digital Archive
Doctoral dissertation