Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
| Main Author: | |
|---|---|
| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
[Jyväskylä] :
2022.
|
| Series: | Research report / Department of Physics, University of Jyväskylä,
2000, 8. |
| Subjects: | |
| Online Access: | JYX-julkaisuarkisto / JYX Digital Archive |
| Access: | Aineisto on vapaasti saatavissa. |
|---|