APA (7th ed.) Citation

Lindell, A. (2022). Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching.

Chicago Style (17th ed.) Citation

Lindell, Anssi. Nanofabrication by Atomic Force Microscopy, Electron Beam Lithography and Reactive Ion Etching. [Jyväskylä], 2022.

MLA (9th ed.) Citation

Lindell, Anssi. Nanofabrication by Atomic Force Microscopy, Electron Beam Lithography and Reactive Ion Etching. 2022.