Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
| Main Author: | |
|---|---|
| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2017.
|
| Series: | Research report / Department of Physics, University of Jyväskylä,
2017, 4. |
| Subjects: | |
| Online Access: | JYX julkaisuarkisto / JYX Digital Archive |
Search Result 1
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
Published 2017
Yhteenveto-osa
Doctoral dissertation