Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
| Main Author: | |
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| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2017.
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| Series: | Research report / Department of Physics, University of Jyväskylä,
2017, 4. |
| Subjects: | |
| Online Access: | JYX julkaisuarkisto / JYX Digital Archive |
| Item Description: | Artikkeliväitöskirjan yhteenveto-osa. |
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| Access: | Aineisto on vapaasti saatavissa. |