Development of MeV ion beam lithography technique for microfluidic applications
| Main Author: | |
|---|---|
| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2011.
|
| Series: | Research report / Department of Physics, University of Jyväskylä,
no. 3/2011. |
| Subjects: | |
| Online Access: | https://jyu.finna.fi/Record/jykdok.1159130 |
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Development of MeV ion beam lithography technique for microfluidic applications
Published 2011
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Doctoral dissertation