Development of MeV ion beam lithography technique for microfluidic applications
| Main Author: | |
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| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2011.
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| Series: | Research report / Department of Physics, University of Jyväskylä,
no. 3/2011. |
| Subjects: | |
| Online Access: | https://jyu.finna.fi/Record/jykdok.1159130 |
| Item Description: | Artikkeliväitöskirjan yhteenveto-osa ja 8 eripainosta. |
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