MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

Bibliographic Details
Main Author:	Gorelick, Sergey
Format:	Doctoral dissertation
Language:	eng
Published:	Jyväskylä : 2008.
Series:	Research report / Department of Physics, University of Jyväskylä, 9/2008.
Subjects:	fysiikka
Online Access:	https://jyu.finna.fi/Record/jykdok.1069235

MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics by Gorelick, Sergey

Published 2008

Get full text

Doctoral dissertation