MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics
| Main Author: | |
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| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2008.
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| Series: | Research report / Department of Physics, University of Jyväskylä,
9/2008. |
| Subjects: | |
| Online Access: | https://jyu.finna.fi/Record/jykdok.1069235 |
| Description not available. |