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080916s2008 fi ||||||m |||||||eng|| |
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|a 978-951-39-3317-3
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|a 1069235
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|a eng
|b heb
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|a 53
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|a Gorelick, Sergey.
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|a MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics /
|c by Sergey Gorelick.
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|a Jyväskylä :
|b University of Jyväskylä,
|c 2008.
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|a viii, 55, [68] sivua :
|b kuvitettu ;
|c 25 cm
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|a teksti
|b txt
|2 rdacontent
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|a käytettävissä ilman laitetta
|b n
|2 rdamedia
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|a Research report / Department of Physics, University of Jyväskylä,
|x 0075-465X ;
|v 9/2008
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|a Väitöskirja
|c Jyväskylän yliopisto, fysiikka.
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|a Myös verkkoaineistona (ISBN 978-951-39-3318-0).
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579 |
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|a XLUETTELOITU
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|a fysiikka
|2 yso/fin
|0 http://www.yso.fi/onto/yso/p900
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|a Research report / Department of Physics, University of Jyväskylä,
|x 0075-465X ;
|v 9/2008.
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|a P
|c 0254912
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|i 114
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|c 1069235
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|b KANAVUORI
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|9 1
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