MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

Bibliographic Details
Main Author: Gorelick, Sergey
Format: Doctoral dissertation
Language:eng
Published: Jyväskylä : 2008.
Series:Research report / Department of Physics, University of Jyväskylä, 9/2008.
Subjects:
Online Access:https://jyu.finna.fi/Record/jykdok.1069235

MARC

LEADER 00000cam a22000004i 4500
001 1069235
003 FI-J
005 20210226170243.0
008 080916s2008 fi ||||||m |||||||eng||
020 |a 978-951-39-3317-3  |q nidottu 
035 |a 1069235 
041 0 |a eng  |b heb 
080 |a 53 
100 1 |a Gorelick, Sergey. 
245 1 0 |a MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics /  |c by Sergey Gorelick. 
260 |a Jyväskylä :  |b University of Jyväskylä,  |c 2008. 
300 |a viii, 55, [68] sivua :  |b kuvitettu ;  |c 25 cm 
336 |a teksti  |b txt  |2 rdacontent 
337 |a käytettävissä ilman laitetta  |b n  |2 rdamedia 
338 |a nide  |b nc  |2 rdacarrier 
490 1 |a Research report / Department of Physics, University of Jyväskylä,  |x 0075-465X ;  |v 9/2008 
502 |a Väitöskirja  |c Jyväskylän yliopisto, fysiikka. 
530 |a Myös verkkoaineistona (ISBN 978-951-39-3318-0). 
579 |a XLUETTELOITU 
650 7 |a fysiikka  |2 yso/fin  |0 http://www.yso.fi/onto/yso/p900 
830 0 |a Research report / Department of Physics, University of Jyväskylä,  |x 0075-465X ;  |v 9/2008. 
852 |a P  |c 0254912 
591 |i 114 
999 |c 1069235  |d 1069235 
952 |b KANAVUORI  |c 1210  |o P 0254912  |9 1