Gorelick, S. (2008). MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics.
Chicago-viite (17. p.)Gorelick, Sergey. MeV Ion Beam Lithography of High Aspect Ratio Structures with a Focused or Aperture-shaped Beam for Applications in Biomedical Studies and Microfluidics. Jyväskylä, 2008.
MLA-viite (9. p.)Gorelick, Sergey. MeV Ion Beam Lithography of High Aspect Ratio Structures with a Focused or Aperture-shaped Beam for Applications in Biomedical Studies and Microfluidics. 2008.
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