Gorelick, S. (2008). MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics.
Chicago Style (17th ed.) CitationGorelick, Sergey. MeV Ion Beam Lithography of High Aspect Ratio Structures with a Focused or Aperture-shaped Beam for Applications in Biomedical Studies and Microfluidics. Jyväskylä, 2008.
MLA (9th ed.) CitationGorelick, Sergey. MeV Ion Beam Lithography of High Aspect Ratio Structures with a Focused or Aperture-shaped Beam for Applications in Biomedical Studies and Microfluidics. 2008.
Warning: These citations may not always be 100% accurate.