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    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics Tekijä Gorelick, Sergey

    Julkaistu 2008
    Hae kokoteksti
    Väitöskirja
  2. 2
    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics Tekijä Gorelick, Sergey

    Julkaistu 2008
    Väitöskirja
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