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  1. 1
    Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films

    Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films by Napari, Mari, kirjoittaja

    Published 2017
    Subjects:
    JYX julkaisuarkisto / JYX Digital Archive
    Doctoral dissertation
  2. 2
    Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films

    Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films by Napari, Mari, kirjoittaja

    Published 2017
    Subjects:
    Yhteenveto-osa
    Doctoral dissertation
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