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    Hydrogen incorporation in Al2O3 thin films grown by atomic layer deposition

    Hydrogen incorporation in Al2O3 thin films grown by atomic layer deposition by Kinnunen, Sami, kirjoittaja

    Published 2022
    Subjects:
    JYX-julkaisuarkisto / JYX Digital Archive
    Linkki verkkoaineistoon
    Doctoral dissertation
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