Showing 1 - 4 results of 4 for search '"atomic layer deposition"', query time: 0.03s Refine Results
  1. 1
  2. 2

    Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films by Napari, Mari, kirjoittaja

    Published 2017
    Subjects:
    Yhteenveto-osa
    Doctoral dissertation
  3. 3

    Carbon nanotube memory devices with high-κ gate dielectrics by Rinkiö, Marcus

    Published 2009
    Subjects:
    Doctoral dissertation
  4. 4
Search Tools: RSS Feed