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1
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
Published 2017JYX julkaisuarkisto / JYX Digital Archive
Doctoral dissertation -
2
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
Published 2017Yhteenveto-osa
Doctoral dissertation -
3
Reinforcing strong coupling with hybrid microcavities for polariton chemistry application
Published 2021Get full text Get full textMaster's thesis