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Fabrication of microfluidic devices through deep wet etching
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Öçal, Süha
Published 2019
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Master's thesis
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Master's thesis
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HF
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chromium
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depth profile
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glass
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gold
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1
kromi
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1
kulta
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1
lasi
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lithography
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litografia
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metal deposition
microfluidics
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mikrofluidistiikka
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surface preparation
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thermal bonding
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Matemaattis-luonnontieteellinen tiedekunta
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automatic subjects
etching (graphics)
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manufacturing
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methods
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microfluidics
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microtechnology
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