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  1. 1
    Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching

    Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching by Lindell, Anssi, kirjoittaja

    Published 2000
    JYX-julkaisuarkisto / JYX Digital Archive
    Doctoral dissertation
  2. 2
    Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching

    Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching by Lindell, Anssi, kirjoittaja

    Published 2000
    JYX-julkaisuarkisto / JYX Digital Archive
    Doctoral dissertation
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