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Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
Published 2017Yhteenveto-osa
Doctoral dissertation -
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Hydrogen incorporation in Al2O3 thin films grown by atomic layer deposition
Published 2022JYX-julkaisuarkisto / JYX Digital Archive
Linkki verkkoaineistoon
Doctoral dissertation -
4
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films
Published 2017JYX julkaisuarkisto / JYX Digital Archive
Doctoral dissertation