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Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
Published 2000JYX-julkaisuarkisto / JYX Digital Archive
Doctoral dissertation -
3
Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
Published 2000JYX-julkaisuarkisto / JYX Digital Archive
Doctoral dissertation -
4
Applications of light-matter interaction in nanosciences
Published 2009Get full text
Doctoral dissertation -
5
Development of microfluidics for sorting of carbon nanotubes
Published 2018JYX julkaisuarkisto / JYX Digital Archive
Doctoral dissertation -
6
Fabrication of microfluidic devices through deep wet etching
Published 2019Get full text Get full textMaster's thesis