Fabrication of a suspended carbon nanotube nanomechanical device via e-beam lithography

Bibliographic Details
Main Author:	Pajunen, Mikael
Other Authors:	Fysiikan laitos, Jyväskylän yliopisto, University of Jyväskylä
Format:	Master's thesis
Language:	fin
Published:	2008
Subjects:	402
Online Access:	https://jyx.jyu.fi/handle/123456789/97823

Internet

https://jyx.jyu.fi/handle/123456789/97823