Development of imaging with MeV ions

MeV ions have wavelengths much less than 1 nm, penetrate deeply into solid materials and interact strongly with atoms in the target by Coulomb forces. This makes them well suited for producing images on a μm or nm scale. In this thesis two complementary aspects of imaging with ion beams have been...

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Main Author: Norarat, Rattanaporn
Other Authors: Faculty of Mathematics and Science, Matemaattis-luonnontieteellinen tiedekunta, University of Jyväskylä, Jyväskylän yliopisto
Format: Doctoral dissertation
Language:eng
Published: 2013
Online Access: https://jyx.jyu.fi/handle/123456789/82271
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author Norarat, Rattanaporn
author2 Faculty of Mathematics and Science Matemaattis-luonnontieteellinen tiedekunta University of Jyväskylä Jyväskylän yliopisto
author_facet Norarat, Rattanaporn Faculty of Mathematics and Science Matemaattis-luonnontieteellinen tiedekunta University of Jyväskylä Jyväskylän yliopisto Norarat, Rattanaporn Faculty of Mathematics and Science Matemaattis-luonnontieteellinen tiedekunta University of Jyväskylä Jyväskylän yliopisto
author_sort Norarat, Rattanaporn
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description MeV ions have wavelengths much less than 1 nm, penetrate deeply into solid materials and interact strongly with atoms in the target by Coulomb forces. This makes them well suited for producing images on a μm or nm scale. In this thesis two complementary aspects of imaging with ion beams have been investigated, namely; the micropatterning by MeV ion beam lithography and obtaining microscopic images by MeV ion microscopy. An overview of the DREAM microbeam project is presented. A description of the DREAM facility, the ion optical design and the data collection system are given. Ions with energies in the MeV range can penetrate into materials along straight trajectories because of their high momentum and create the vertical sidewalls in resist materials after development with a suitable solvent. This makes MeV ion beam lithography a useful tool for direct-writing of high aspect ratio structures. This technique is receiving a growing interest for applications such as microfluidics, optical waveguide devices and bioscience applications. MeV ion microscopy can be used to study the structure of cells or sub-cellular organelles in biomedical imaging. The principle underlying this technique is that a finely focusedMeV ion beam is scanned over the biological sample. Mapping in 2D (in some cases even 3D) is performed by synchronous collection of Ion Beam Analysis (IBA) signals such as Scanning Transmission Ion Microscopy (STIM), Proton Induced Fluorescence (PIF), Rutherford Backscattering Spectrometry (RBS) and Particle Induced X-ray Emission (PIXE). In this thesis work we investigated how the MeV ion fluence influences the lithographic images in PMMA resist polymer. This study provided important ion exposure information for selecting the optimal conditions for MeV ion beam lithography. It was found that the width of the exposure window between complete clearing and the onset of cross-linking depended on the ion species. Protons because of they have the widest exposure window and also the longest range are best suited for lithography. The use of Proton Induced Fluorescence (PIF) imaging to image uv fluorescent markers in cells in conjunction with imaging of the cell structure using Direct-Scanning Transmission Ion Microscopy (Direct- STIM) was shown to give images with much better resolution than could be obtained with a conventional uv fluorescent optical microscope. This points the way to new uses of this method for tracing biomolecule pathways with higher resolution than is possible by optical microscopy. In addition, we have studied numerical image processing approaches to improve in an objective way the visual quality of the MeV ion microscope images which su↵er from speckle noise.
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In\r\nthis thesis two complementary aspects of imaging with ion beams have been\r\ninvestigated, namely; the micropatterning by MeV ion beam lithography and\r\nobtaining microscopic images by MeV ion microscopy. An overview of the DREAM microbeam project is presented. A description of\r\nthe DREAM facility, the ion optical design and the data collection system are\r\ngiven.\r\nIons with energies in the MeV range can penetrate into materials along straight\r\ntrajectories because of their high momentum and create the vertical sidewalls\r\nin resist materials after development with a suitable solvent. This makes MeV\r\nion beam lithography a useful tool for direct-writing of high aspect ratio structures.\r\nThis technique is receiving a growing interest for applications such as\r\nmicrofluidics, optical waveguide devices and bioscience applications.\r\nMeV ion microscopy can be used to study the structure of cells or sub-cellular\r\norganelles in biomedical imaging. The principle underlying this technique is that\r\na finely focusedMeV ion beam is scanned over the biological sample. Mapping in\r\n2D (in some cases even 3D) is performed by synchronous collection of Ion Beam\r\nAnalysis (IBA) signals such as Scanning Transmission Ion Microscopy (STIM),\r\nProton Induced Fluorescence (PIF), Rutherford Backscattering Spectrometry\r\n(RBS) and Particle Induced X-ray Emission (PIXE).\r\nIn this thesis work we investigated how the MeV ion fluence influences the lithographic\r\nimages in PMMA resist polymer. This study provided important ion\r\nexposure information for selecting the optimal conditions for MeV ion beam\r\nlithography. It was found that the width of the exposure window between complete\r\nclearing and the onset of cross-linking depended on the ion species. Protons\r\nbecause of they have the widest exposure window and also the longest range\r\nare best suited for lithography. The use of Proton Induced Fluorescence (PIF)\r\nimaging to image uv fluorescent markers in cells in conjunction with imaging of\r\nthe cell structure using Direct-Scanning Transmission Ion Microscopy (Direct-\r\nSTIM) was shown to give images with much better resolution than could be\r\nobtained with a conventional uv fluorescent optical microscope. This points the\r\nway to new uses of this method for tracing biomolecule pathways with higher\r\nresolution than is possible by optical microscopy. In addition, we have studied\r\nnumerical image processing approaches to improve in an objective way the visual\r\nquality of the MeV ion microscope images which su\u21b5er from speckle noise.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2022-07-11T09:30:35Z\r\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2022-07-11T09:30:35Z (GMT). No. of bitstreams: 0\r\n Previous issue date: 2013", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.relation.ispartofseries", "value": "Jyv\u00e4skyl\u00e4n yliopisto. Fysiikan laitos. Research report", "language": null, "element": "relation", "qualifier": "ispartofseries", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli I:</b> Norarat, R., Puttaraksa, N., Napari, M., Sagari A.R., A., Laitinen, M., Sajavaara, T., Yotprayoonsak, P., Pettersson, M., Chienthavorn, O., & Whitlow, H. (2013). Why are hydrogen ions best for MeV ion beam lithography?. <i>Microelectronic Engineering, 102, 22-24.</i> DOI: <a href=\"https://doi.org/10.1016/j.mee.2012.02.012\"target=\"_blank\"> 10.1016/j.mee.2012.02.012</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli II:</b> Puttaraksa, N., Norarat, R., Laitinen, M., Sajavaara, T., Singkarat, S., & Whitlow, H. (2012). Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272, 162.</i> DOI: <a href=\"https://doi.org/10.1016/j.nimb.2011.01.056\"target=\"_blank\"> 10.1016/j.nimb.2011.01.056</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli III:</b> Norarat, R., Marjom\u00e4ki, V., Chen, X., Zhaohong, M., Minqin, R., Chen, C.-B., Bettiol, A., Whitlow, H., & Watt, F. (2013). Ion-induced fluorescence imaging of endosomes. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (pp. 113-116). Elsevier. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.</i> DOI: <a href=\"https://doi.org/10.1016/j.nimb.2012.12.052\"target=\"_blank\"> 10.1016/j.nimb.2012.12.052</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli IV:</b> Norarat, R., Whitlow, H., Ren, M., Osipowicz, T., van Kan, J. A., Timonen, J., & Watt, F. (2013). Objective improvement of the visual quality of ion microscope images. <i>Microelectronic Engineering, 102, 4-8.</i> DOI: <a href=\"https://doi.org/10.1016/j.mee.2012.02.010\"target=\"_blank\"> 10.1016/j.mee.2012.02.010 </a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli V:</b> Whitlow, H., Norarat, R., Sajavaara, T., Laitinen, M., Ranttila, K., Heikkinen, P., H\u00e4nninen, V., Rossi, M., Jones, P., Timonen, J., Gilbert, L., Marjom\u00e4ki, V., Ren, M., van Kan, J. A., Osipowicz, T., & Watt, F. (2011). Investigation Of Multi-Resolution Support For MeV Ion Microscopy Imaging. In <i>F. D. McDaniel, & B. L. Doyle (Eds.), American Institute of Physics Conference Proceedings (pp. 253-256). American Institute of Physics.</i> DOI: <a href=\"https://doi.org/10.1063/1.3586098\"target=\"_blank\"> 10.1063/1.3586098</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": null, "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.title", "value": "Development of imaging with MeV ions", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "doctoral thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:ISBN:978-951-39-9352-8", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Mathematics and Science", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_db06", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.relation.issn", "value": "0075-465X", "language": null, "element": "relation", "qualifier": "issn", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": null, "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "doctoralThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}]
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spellingShingle Norarat, Rattanaporn Development of imaging with MeV ions
title Development of imaging with MeV ions
title_full Development of imaging with MeV ions
title_fullStr Development of imaging with MeV ions Development of imaging with MeV ions
title_full_unstemmed Development of imaging with MeV ions Development of imaging with MeV ions
title_short Development of imaging with MeV ions
title_sort development of imaging with mev ions
title_txtP Development of imaging with MeV ions
url https://jyx.jyu.fi/handle/123456789/82271 http://www.urn.fi/URN:ISBN:978-951-39-9352-8
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