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[{"key": "dc.contributor.author", "value": "Norarat, Rattanaporn", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2022-07-11T09:30:35Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2022-07-11T09:30:35Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2013", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.isbn", "value": "978-951-39-9352-8", "language": null, "element": "identifier", "qualifier": "isbn", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/82271", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "MeV ions have wavelengths much less than 1 nm, penetrate deeply into solid\r\nmaterials and interact strongly with atoms in the target by Coulomb forces.\r\nThis makes them well suited for producing images on a \u03bcm or nm scale. In\r\nthis thesis two complementary aspects of imaging with ion beams have been\r\ninvestigated, namely; the micropatterning by MeV ion beam lithography and\r\nobtaining microscopic images by MeV ion microscopy. An overview of the DREAM microbeam project is presented. A description of\r\nthe DREAM facility, the ion optical design and the data collection system are\r\ngiven.\r\nIons with energies in the MeV range can penetrate into materials along straight\r\ntrajectories because of their high momentum and create the vertical sidewalls\r\nin resist materials after development with a suitable solvent. This makes MeV\r\nion beam lithography a useful tool for direct-writing of high aspect ratio structures.\r\nThis technique is receiving a growing interest for applications such as\r\nmicrofluidics, optical waveguide devices and bioscience applications.\r\nMeV ion microscopy can be used to study the structure of cells or sub-cellular\r\norganelles in biomedical imaging. The principle underlying this technique is that\r\na finely focusedMeV ion beam is scanned over the biological sample. Mapping in\r\n2D (in some cases even 3D) is performed by synchronous collection of Ion Beam\r\nAnalysis (IBA) signals such as Scanning Transmission Ion Microscopy (STIM),\r\nProton Induced Fluorescence (PIF), Rutherford Backscattering Spectrometry\r\n(RBS) and Particle Induced X-ray Emission (PIXE).\r\nIn this thesis work we investigated how the MeV ion fluence influences the lithographic\r\nimages in PMMA resist polymer. This study provided important ion\r\nexposure information for selecting the optimal conditions for MeV ion beam\r\nlithography. It was found that the width of the exposure window between complete\r\nclearing and the onset of cross-linking depended on the ion species. Protons\r\nbecause of they have the widest exposure window and also the longest range\r\nare best suited for lithography. The use of Proton Induced Fluorescence (PIF)\r\nimaging to image uv fluorescent markers in cells in conjunction with imaging of\r\nthe cell structure using Direct-Scanning Transmission Ion Microscopy (Direct-\r\nSTIM) was shown to give images with much better resolution than could be\r\nobtained with a conventional uv fluorescent optical microscope. This points the\r\nway to new uses of this method for tracing biomolecule pathways with higher\r\nresolution than is possible by optical microscopy. In addition, we have studied\r\nnumerical image processing approaches to improve in an objective way the visual\r\nquality of the MeV ion microscope images which su\u21b5er from speckle noise.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2022-07-11T09:30:35Z\r\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2022-07-11T09:30:35Z (GMT). No. of bitstreams: 0\r\n Previous issue date: 2013", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.relation.ispartofseries", "value": "Jyv\u00e4skyl\u00e4n yliopisto. Fysiikan laitos. Research report", "language": null, "element": "relation", "qualifier": "ispartofseries", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli I:</b> Norarat, R., Puttaraksa, N., Napari, M., Sagari A.R., A., Laitinen, M., Sajavaara, T., Yotprayoonsak, P., Pettersson, M., Chienthavorn, O., & Whitlow, H. (2013). Why are hydrogen ions best for MeV ion beam lithography?. <i>Microelectronic Engineering, 102, 22-24.</i> DOI: <a href=\"https://doi.org/10.1016/j.mee.2012.02.012\"target=\"_blank\"> 10.1016/j.mee.2012.02.012</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli II:</b> Puttaraksa, N., Norarat, R., Laitinen, M., Sajavaara, T., Singkarat, S., & Whitlow, H. (2012). Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272, 162.</i> DOI: <a href=\"https://doi.org/10.1016/j.nimb.2011.01.056\"target=\"_blank\"> 10.1016/j.nimb.2011.01.056</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli III:</b> Norarat, R., Marjom\u00e4ki, V., Chen, X., Zhaohong, M., Minqin, R., Chen, C.-B., Bettiol, A., Whitlow, H., & Watt, F. (2013). Ion-induced fluorescence imaging of endosomes. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (pp. 113-116). Elsevier. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.</i> DOI: <a href=\"https://doi.org/10.1016/j.nimb.2012.12.052\"target=\"_blank\"> 10.1016/j.nimb.2012.12.052</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli IV:</b> Norarat, R., Whitlow, H., Ren, M., Osipowicz, T., van Kan, J. A., Timonen, J., & Watt, F. (2013). Objective improvement of the visual quality of ion microscope images. <i>Microelectronic Engineering, 102, 4-8.</i> DOI: <a href=\"https://doi.org/10.1016/j.mee.2012.02.010\"target=\"_blank\"> 10.1016/j.mee.2012.02.010 </a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.relation.haspart", "value": "<b>Artikkeli V:</b> Whitlow, H., Norarat, R., Sajavaara, T., Laitinen, M., Ranttila, K., Heikkinen, P., H\u00e4nninen, V., Rossi, M., Jones, P., Timonen, J., Gilbert, L., Marjom\u00e4ki, V., Ren, M., van Kan, J. A., Osipowicz, T., & Watt, F. (2011). Investigation Of Multi-Resolution Support For MeV Ion Microscopy Imaging. In <i>F. D. McDaniel, & B. L. Doyle (Eds.), American Institute of Physics Conference Proceedings (pp. 253-256). American Institute of Physics.</i> DOI: <a href=\"https://doi.org/10.1063/1.3586098\"target=\"_blank\"> 10.1063/1.3586098</a>", "language": null, "element": "relation", "qualifier": "haspart", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": null, "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.title", "value": "Development of imaging with MeV ions", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "doctoral thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:ISBN:978-951-39-9352-8", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Mathematics and Science", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_db06", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.relation.issn", "value": "0075-465X", "language": null, "element": "relation", "qualifier": "issn", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": null, "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "doctoralThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}]
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