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[{"key": "dc.contributor.advisor", "value": "Maasilta, Ilari", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Lankinen, Aaro", "language": "", "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2021-12-22T05:44:50Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2021-12-22T05:44:50Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2019", "language": "", "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/79112", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Ionimikroskopia (FIB) on pyyhk\u00e4isyelektronimikroskopiaa muistuttava nanoskaalan\nkuvantamis- ja ty\u00f6st\u00e4mismenetelm\u00e4, joka k\u00e4yt\u00e4\u00e4 kevyiden elektronien sijasta massiivisia ioneja. K\u00e4sittelen t\u00e4ss\u00e4 tutkielmassa FIB-laitteistojen kehityskaaren ensimm\u00e4isen\nsukupolven Ga-FIB:st\u00e4, toisen sukupolven FIB/SEM-hybridiin ja kolmannen sukupolven selektiiviseen ionil\u00e4hteeseen. Lis\u00e4ksi tarkastelen FIB:n moninaisia sovelluksia\nlaboratorio- ja teollisuusymp\u00e4rist\u00f6ss\u00e4, nyt ja tulevaisuudessa. T\u00e4m\u00e4 tutkielma on\nkirjallisuuskatsaus ja se on tarkoitettu avuksi syvemm\u00e4n tutkimuksen valmisteluun\naiheesta kiinnostuneille.\n\nFIB:n p\u00e4\u00e4asiallisia k\u00e4ytt\u00f6kohteita ovat TEM-n\u00e4ytteenvalmistus ja mikropiirien\nvirheanalyysi ja takaisinmallinnus. Toisen sukupolven kaksipylv\u00e4slaitteistojen my\u00f6t\u00e4 voidaan samalla laitteella kuvantaa elektronisuihkulla ja ty\u00f6st\u00e4\u00e4 ionisuihkulla\nn\u00e4ytett\u00e4 samanaikaisesti. Tulevaisuudessa FIB:n uskotaan pystyv\u00e4n yksitt\u00e4isten atomien istutukseen ja sill\u00e4 tulee olemaan yh\u00e4 enemm\u00e4n sovelluksia nano-optiikan ja\n-magnetismin, sek\u00e4 spinelektroniikan aloilla. Uusien kasvatus- ja jyrsint\u00e4protokollien my\u00f6t\u00e4 FIB:ll\u00e4 voidaan kehitt\u00e4\u00e4 nanoelektromekaanisten j\u00e4rjestelmien (NEMS)\nprototyyppej\u00e4 yh\u00e4 nopeammin. FIB on viimeisen kahdenkymmenen vuoden aikana\nvakiinnuttanut paikkansa niin tutkimus- kuin teollisessa k\u00e4yt\u00f6ss\u00e4 ja parhaillaan\nk\u00e4ytt\u00f6\u00f6n otettavien selektiivisten ionil\u00e4hteiden my\u00f6t\u00e4 sen k\u00e4ytt\u00f6kohteet kasvavat\nentisest\u00e4\u00e4n.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Focused ion beam (FIB) is nanoscale imaging and fabrication technique that is\nsimilar in operation to scanning electron microscopy, except that it uses massive\nions instead of light electrons. In this thesis, I will discuss the development of the\nFIB from first generation Ga-FIB to second generation FIB-SEM hybrids and third\ngeneration selective ion sources. I will also examine its various present and future\napplications in both laboratory and industrial settings. This thesis is a literature\nreview and it is intended to aid in further research preparation for those interested\nin the subject.\n\nFIB is primarily used in TEM sample preparation and microcircuit error analysis\nand reverse engineering. With the advent of second generation dual beam systems,\nthe same instrument can image and fabricate a sample simultaneously using electron\nand ion beams respectively. In the future, the FIB is believed to be able to implant\nsingle atoms and it will have yet more applications in the fields of nano-optics, -\nmagnetism and spintronics. With emerging deposition and milling procedures, the\nFIB will be able to develop prototypes for nanoelectromechanical systems (NEMS)\neven faster. During the last twenty years, FIB has solidified its place in both research\nand industrial use and its potential uses grow ever wider with the recent introduction\nof selective ion sources.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Miia Hakanen (mihakane@jyu.fi) on 2021-12-22T05:44:50Z\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2021-12-22T05:44:50Z (GMT). No. of bitstreams: 0\n Previous issue date: 2019", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "47", "language": "", "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.language.iso", "value": "fin", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "FIB", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "ionimikroskopia", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "sulametalli-ionil\u00e4hde", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "LMIS", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "kaasukentt\u00e4ionil\u00e4hde", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "GFIS", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "jyrsint\u00e4", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "kasvatus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "FIB-tekniikoiden sovellukset", "language": "", "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "bachelor thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-202112226094", "language": "", "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Bachelor's thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Kandidaatinty\u00f6", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": "", "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_7a1f", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": null, "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "bachelorThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4021", "language": "", "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}]
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