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[{"key": "dc.contributor.advisor", "value": "Sajavaara, Timo", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Manninen, Emmi", "language": "", "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2020-07-30T07:43:43Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2020-07-30T07:43:43Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2020", "language": "", "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/71288", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Atomikerroskasvatus eli ALD on edistyksellinen ohutkalvojen kasvatusmenetelm\u00e4, jonka periaatteellisena ideana on kasvattaa tasapaksu ohutkalvo alustalle eli substraatille nimens\u00e4 mukaisesti atomikerros kerrallaan. Menetelm\u00e4\u00e4 k\u00e4ytet\u00e4\u00e4n laajasti mm. elektroniikan komponenttien valmistuksessa ja varsinkin viime vuosina atomikerroskasvatusta on alettu hy\u00f6dynt\u00e4\u00e4 my\u00f6s mikroelektroniikan taipuisissa komponenteissa. Nykyisiss\u00e4 sovelluksissa kalvon kasvatus suoritetaan yleens\u00e4 suoraan kohdepinnalle, ja kasvatusta v\u00e4liaikaiselle alustalle onkin tutkittu melko v\u00e4h\u00e4n. T\u00e4ss\u00e4 ty\u00f6ss\u00e4 selvitettiin, voidaanko atomikerroskasvatuksella valmistettuja ohutkalvoja k\u00e4ytt\u00e4\u00e4 siirtopintoina. Siirtopinnalla tarkoitetaan t\u00e4ss\u00e4 yhteydess\u00e4 ohutkalvoa, joka voidaan siirt\u00e4\u00e4 v\u00e4liaikaisen substraatin p\u00e4\u00e4lt\u00e4 uudelle kohdepinnalle. Prosessissa v\u00e4liaikainen substraatti h\u00e4vitet\u00e4\u00e4n l\u00e4mm\u00f6n tai liuotuksen avulla. V\u00e4liaikaisina substraatteina tutkimuksessa k\u00e4ytettiin polymeereja ja kohdepintoina piikiekon palasta sek\u00e4 Kapton-polymeeria. Tutkimus koostui oleellisesti kahdesta eri kokeellisesta osuudesta, kalvon kasvattamisesta ja sen siirrosta. Kasvatettavaksi kalvoksi valittiin sinkkioksidi, joka ei kuitenkaan sellaisenaan kasvanut kaikille polymeereille. Ongelma ratkaistiin kasvattamalla n\u00e4ille polymeereille sinkkioksidikerroksen alle alumiinioksidikerros. Kasvatusten j\u00e4lkeinen kalvon siirto tuotti ongelmia, eik\u00e4 kalvo siirtynyt onnistuneesti kummallakaan siirtotavalla kummallekaan kohdepinnalle. Syit\u00e4 siirron ep\u00e4onnistumiselle voisivat olla esimerkiksi liian suoraviivaiset siirtomenetelm\u00e4t.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Atomic layer deposition, known as ALD, is a progressive method of thin film deposition. The principled idea behind the technique is to grow a uniform thin film on a target surface one atomic layer at a time. The technique is used widely for example in electrical components and especially during the past few years ALD has also been used in the flexible components in microelectronics. With current applications the growth of a thin film is usually performed directly on the target surface and the growth on temporary substrate has been rarely studied. In this work it was studied whether ALD grown thin films could be used as transferable thin films. In this thesis transferable thin film means a thin film that can be transferred from a temporary substrate to a new target surface. During the process the temporary substrate is removed either using heat or solvent. The temporary substrates in this work were polymers and the target surfaces were pieces of silicon and Kapton. The research primarily consisted of two parts, ALD growth and transfer of the grown thin films. Grown thin film was selected to be zinc oxide which however didn't grow on some of the polymers. The problem was solved by growing an aluminium oxide layer beneath the zinc oxide layer. The transfer after the growths was problematic and both methods of transfer were unsuccessful for both target materials. The unsuccessful transfers could be due to the too straightforward methods of transfers.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2020-07-30T07:43:43Z\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2020-07-30T07:43:43Z (GMT). No. of bitstreams: 0\n Previous issue date: 2020", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "64", "language": "", "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "fin", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "siirtopinta", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "ionisuihkumenetelm\u00e4t", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "ToF-ERDA", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "kohdepinta", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Atomikerroskasvatuksella kasvatetut oksidikalvot ja niiden siirto v\u00e4liaikaiselta polymeerisubstraatilta kohdepinnalle", "language": "", "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-202007305436", "language": "", "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": "", "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": null, "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4021", "language": "", "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.subject.yso", "value": "polymeerit", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "ohutkalvot", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "atomikerroskasvatus", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
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