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[{"key": "dc.contributor.advisor", "value": "Pettersson, Mika", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.advisor", "value": "Myllyperki\u00f6, Pasi", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Parikka, Johannes", "language": "", "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2020-06-22T09:45:35Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2020-06-22T09:45:35Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2020", "language": "", "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/70099", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "T\u00e4m\u00e4 tutkielma k\u00e4sittelee spatiaalisen valomodulaattorin (SLM) k\u00e4ytt\u00f6\u00e4 grafeenin 3D-muokkauksessa eli optisessa taonnassa. Lis\u00e4ksi projektissa perehdyttiin yleisesti optiikan komponenttien k\u00e4ytt\u00f6\u00f6n sek\u00e4 atomivoima- ja Ramanmikroskooppien hy\u00f6dynt\u00e4miseen 3D-pinnan tutkimisessa. \n\nProjektin p\u00e4\u00e4tavoitteena oli kehitt\u00e4\u00e4 grafeenin taontaan sek\u00e4 hapettamiseen menetelm\u00e4, jolla saataisiin tehty\u00e4 haluttu kuvio yhdell\u00e4 laservalotuksella yksitt\u00e4isten pisteiden sijaan. T\u00e4m\u00e4 nopeuttaisi valmistusprosessia huomattavasti ja auttaisi parantamaan kuvion resoluutiota. \n\nProjektissa koottiin optinen asetelma, jolla onnistuttiin valmistamaan taottua sek\u00e4 hapetettua grafeenia uudella menetelm\u00e4ll\u00e4 k\u00e4ytt\u00e4en pulssilaseria, valomodulaattoria sek\u00e4 optista mikroskooppia p\u00e4\u00e4komponentteina. Asetelmaa optimoitiin koko ty\u00f6n ajan ja sen kehitt\u00e4minen sek\u00e4 optimointi veiv\u00e4t eniten aikaa. Optimointi koostui p\u00e4\u00e4osin asetelman linjauksen parantamisesta, jolloin valotehoa saatiin enemm\u00e4n n\u00e4ytteelle. \n\nProjektin aikana opittiin, miten modulaattori toimii grafeenin taonnassa ja miten modulaattorin eri parametrit vaikuttavan sen toimintaan. Mm. modulaattorin linssifunktion (lens phase) arvoa muuttamalla 0-kertaluku saatiin fokusoitua eri tasoon varsinaisen kuvion kanssa sek\u00e4 huomattiin, ett\u00e4 sen arvon merkill\u00e4 (+/-) on suuri merkitys lasertehoon arvoon kuvion mukaan.\n\nTy\u00f6n n\u00e4ytteet valmistettiin grafeenilevylle (VMH-400), joka on k\u00e4yt\u00e4nn\u00f6ss\u00e4 piilevylle muodostettu grafeenikerros. Ty\u00f6n tuloksista voitiin todeta, ett\u00e4 taottua sek\u00e4 hapetettua grafeenia onnistuttiin valmistamaan kuvio kerrallaan. Taottu grafeeni havaittiin optisen sek\u00e4 atomivoimamikroskoopin avulla. Hapettuman karakterisointi voitiin vahvistaa Ramanmikroskoopilla mitatun spektrin avulla. Tuloksista havaittiin kuitenkin, ett\u00e4 mill\u00e4\u00e4n valotuksella ei saavutettu t\u00e4ysin tavoiteltua kuviota. AFM-tulosten analysoimisessa k\u00e4ytettiin NanoScope-ohjelmistoa.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Miia Hakanen (mihakane@jyu.fi) on 2020-06-22T09:45:35Z\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2020-06-22T09:45:35Z (GMT). No. of bitstreams: 0\n Previous issue date: 2020", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "108", "language": "", "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "fin", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "spatiaalinen valomodulaattori", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "atomivoimamikroskopia", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "Ramanmikroskopia", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "laser", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Spatiaalisen valomodulaattorin k\u00e4ytt\u00f6 grafeenin muokkauksessa", "language": "", "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-202006224300", "language": "", "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Kemian laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Chemistry", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysikaalinen kemia", "language": "fi", "element": "subject", 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