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1799745731081273344
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etching (graphics)
microfluidics
manufacturing
methods
microtechnology
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http://www.yso.fi/onto/yso/p10915
http://www.yso.fi/onto/yso/p38414
http://www.yso.fi/onto/yso/p8606
http://www.yso.fi/onto/yso/p1913
http://www.yso.fi/onto/yso/p11464
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| author |
Öçal, Süha
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| author2 |
Matemaattis-luonnontieteellinen tiedekunta
Faculty of Sciences
Bio- ja ympäristötieteiden laitos
Department of Biological and Environmental Science
Jyväskylän yliopisto
University of Jyväskylä
Solu- ja molekyylibiologia
Cell and molecular biology
4013
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Öçal, Süha
Matemaattis-luonnontieteellinen tiedekunta
Faculty of Sciences
Bio- ja ympäristötieteiden laitos
Department of Biological and Environmental Science
Jyväskylän yliopisto
University of Jyväskylä
Solu- ja molekyylibiologia
Cell and molecular biology
4013
Öçal, Süha
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Öçal, Süha
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Jyväskylän yliopisto
JYX-julkaisuarkisto
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Bio- ja ympäristötieteiden laitos
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Matemaattis-luonnontieteellinen tiedekunta
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Öçal, Süha
Fabrication of microfluidic devices through deep wet etching
depth profile
HF
metal deposition
surface preparation
thermal bonding
mikrofluidistiikka
litografia
kulta
lasi
kromi
microfluidics
lithography
gold
glass
chromium
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Solu- ja molekyylibiologia
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https://jyu.finna.fi/Cover/Show?source=Solr&id=jyx.123456789_67113&index=0&size=large
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| title |
Fabrication of microfluidic devices through deep wet etching
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| title_full |
Fabrication of microfluidic devices through deep wet etching
|
| title_fullStr |
Fabrication of microfluidic devices through deep wet etching
Fabrication of microfluidic devices through deep wet etching
|
| title_full_unstemmed |
Fabrication of microfluidic devices through deep wet etching
Fabrication of microfluidic devices through deep wet etching
|
| title_short |
Fabrication of microfluidic devices through deep wet etching
|
| title_sort |
fabrication of microfluidic devices through deep wet etching
|
| title_txtP |
Fabrication of microfluidic devices through deep wet etching
|
| topic |
depth profile
HF
metal deposition
surface preparation
thermal bonding
mikrofluidistiikka
litografia
kulta
lasi
kromi
microfluidics
lithography
gold
glass
chromium
|
| topic_facet |
HF
chromium
depth profile
glass
gold
kromi
kulta
lasi
lithography
litografia
metal deposition
microfluidics
mikrofluidistiikka
surface preparation
thermal bonding
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https://jyx.jyu.fi/handle/123456789/67113
http://www.urn.fi/URN:NBN:fi:jyu-202001071054
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AT öcalsuha fabricationofmicrofluidicdevicesthroughdeepwetetching
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