Fabrication of microfluidic devices through deep wet etching

Soda-lime glass is a commonly used, cheap and accessible material. Just like any other glass, it offers unique optical properties. Most of the incoming light is transmitted through the glass, which makes soda-lime an attractive material to be used in analytical and observational purposes. For this r...

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Main Author: Öçal, Süha
Other Authors: Matemaattis-luonnontieteellinen tiedekunta, Faculty of Sciences, Bio- ja ympäristötieteiden laitos, Department of Biological and Environmental Science, Jyväskylän yliopisto, University of Jyväskylä
Format: Master's thesis
Language:eng
Published: 2019
Subjects:
Online Access: https://jyx.jyu.fi/handle/123456789/67113
_version_ 1826225745552211968
author Öçal, Süha
author2 Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Bio- ja ympäristötieteiden laitos Department of Biological and Environmental Science Jyväskylän yliopisto University of Jyväskylä
author_facet Öçal, Süha Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Bio- ja ympäristötieteiden laitos Department of Biological and Environmental Science Jyväskylän yliopisto University of Jyväskylä Öçal, Süha Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Bio- ja ympäristötieteiden laitos Department of Biological and Environmental Science Jyväskylän yliopisto University of Jyväskylä
author_sort Öçal, Süha
datasource_str_mv jyx
description Soda-lime glass is a commonly used, cheap and accessible material. Just like any other glass, it offers unique optical properties. Most of the incoming light is transmitted through the glass, which makes soda-lime an attractive material to be used in analytical and observational purposes. For this reason, glass is an excellent source material for microfluidics practices. Microfluidics is the manipulation of the fluids in micro-scales; enclosed microfluidic systems offers a variety of possibilities in biochemical research, since most bio mechanism operate on micro-scale. However, fabrication of microfluidic systems offer challenges. In this paper, multiple fabrication methods was attempted to create a microfluidic device that can be utilized in cell sorting purposes. Hydrofluoric acid (HF) is a strong chemical and it is commonly practiced to generate patterns on glass-based materials. To withstand HF, glass surface was covered with either chromium or gold. In this experiment, two different concentrations of HF were tested; 6% and 48% HF. Generation of deep patterns were consuming excessive time with 6% HF, protective mask was unable to withstand the harsh conditions. On the other hand, increasing the concentration by eightfold decreased the time consumption by 47 times. Main findings of this study was the usage of high concentration of HF and application of gold layer, chromium layer was not durable enough. Flow was generated successfully within the device, sample beads were transported effortlessly. Many of the reported methods in this paper can be improved; however, a working fabrication method was developed.
first_indexed 2024-09-11T08:52:37Z
format Pro gradu
free_online_boolean 1
fullrecord [{"key": "dc.contributor.advisor", "value": "Johansson, Andreas", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.advisor", "value": "Tiirola, Marja", "language": "", "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "\u00d6\u00e7al, S\u00fcha", "language": "", "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2020-01-07T10:06:23Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2020-01-07T10:06:23Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2019", "language": "", "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/67113", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Soda-lime glass is a commonly used, cheap and accessible material. Just like any\nother glass, it offers unique optical properties. Most of the incoming light is\ntransmitted through the glass, which makes soda-lime an attractive material to be\nused in analytical and observational purposes. For this reason, glass is an excellent\nsource material for microfluidics practices. Microfluidics is the manipulation of the\nfluids in micro-scales; enclosed microfluidic systems offers a variety of possibilities\nin biochemical research, since most bio mechanism operate on micro-scale.\nHowever, fabrication of microfluidic systems offer challenges. In this paper,\nmultiple fabrication methods was attempted to create a microfluidic device that can\nbe utilized in cell sorting purposes.\n\nHydrofluoric acid (HF) is a strong chemical and it is commonly practiced to\ngenerate patterns on glass-based materials. To withstand HF, glass surface was\ncovered with either chromium or gold. In this experiment, two different\nconcentrations of HF were tested; 6% and 48% HF. Generation of deep patterns were\nconsuming excessive time with 6% HF, protective mask was unable to withstand\nthe harsh conditions. On the other hand, increasing the concentration by eightfold\ndecreased the time consumption by 47 times. Main findings of this study was the\nusage of high concentration of HF and application of gold layer, chromium layer\nwas not durable enough. Flow was generated successfully within the device, sample\nbeads were transported effortlessly. Many of the reported methods in this paper can\nbe improved; however, a working fabrication method was developed.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2020-01-07T10:06:23Z\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2020-01-07T10:06:23Z (GMT). No. of bitstreams: 0\n Previous issue date: 2019", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "54", "language": "", "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "depth profile", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "HF", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "metal deposition", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "surface preparation", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "thermal bonding", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Fabrication of microfluidic devices through deep wet etching", "language": "", "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-202001071054", "language": "", "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Bio- ja ymp\u00e4rist\u00f6tieteiden laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Biological and Environmental Science", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Solu- ja molekyylibiologia", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Cell and molecular biology", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": "", "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": null, "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4013", "language": "", "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.subject.yso", "value": "mikrofluidistiikka", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "litografia", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "kulta", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "lasi", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "kromi", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "microfluidics", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "lithography", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "gold", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "glass", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "chromium", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
id jyx.123456789_67113
language eng
last_indexed 2025-02-18T10:56:50Z
main_date 2019-01-01T00:00:00Z
main_date_str 2019
online_boolean 1
online_urls_str_mv {"url":"https:\/\/jyx.jyu.fi\/bitstreams\/00bd3ee0-8663-4e30-b34f-e3b3d6358061\/download","text":"URN:NBN:fi:jyu-202001071054.pdf","source":"jyx","mediaType":"application\/pdf"}
publishDate 2019
record_format qdc
source_str_mv jyx
spellingShingle Öçal, Süha Fabrication of microfluidic devices through deep wet etching depth profile HF metal deposition surface preparation thermal bonding Solu- ja molekyylibiologia Cell and molecular biology 4013 mikrofluidistiikka litografia kulta lasi kromi microfluidics lithography gold glass chromium
title Fabrication of microfluidic devices through deep wet etching
title_full Fabrication of microfluidic devices through deep wet etching
title_fullStr Fabrication of microfluidic devices through deep wet etching Fabrication of microfluidic devices through deep wet etching
title_full_unstemmed Fabrication of microfluidic devices through deep wet etching Fabrication of microfluidic devices through deep wet etching
title_short Fabrication of microfluidic devices through deep wet etching
title_sort fabrication of microfluidic devices through deep wet etching
title_txtP Fabrication of microfluidic devices through deep wet etching
topic depth profile HF metal deposition surface preparation thermal bonding Solu- ja molekyylibiologia Cell and molecular biology 4013 mikrofluidistiikka litografia kulta lasi kromi microfluidics lithography gold glass chromium
topic_facet 4013 Cell and molecular biology HF Solu- ja molekyylibiologia chromium depth profile glass gold kromi kulta lasi lithography litografia metal deposition microfluidics mikrofluidistiikka surface preparation thermal bonding
url https://jyx.jyu.fi/handle/123456789/67113 http://www.urn.fi/URN:NBN:fi:jyu-202001071054
work_keys_str_mv AT öcalsuha fabricationofmicrofluidicdevicesthroughdeepwetetching