2D phonon thermal transport in thin SiN film

Tässä tutkielmassa suunnitellaan, valmistetaan ja kokeillaan uudenlaista suprajohde- normaalimetalli-suprajohde (SNS) lämmintintä. Uutta lämmittimessä on sen geometria, jonka on tarkoitus tehdä mittaustulosten analysoinnista helpompaa kuin aiemmin. SNS liitoksen käyttäminen lämmittimenä suprajohde...

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Bibliografiset tiedot
Päätekijä: Loippo, Teemu
Muut tekijät: Matemaattis-luonnontieteellinen tiedekunta, Faculty of Sciences, Fysiikan laitos, Department of Physics, Jyväskylän yliopisto, University of Jyväskylä
Aineistotyyppi: Pro gradu
Kieli:eng
Julkaistu: 2019
Aiheet:
Linkit: https://jyx.jyu.fi/handle/123456789/63364
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author Loippo, Teemu
author2 Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics Jyväskylän yliopisto University of Jyväskylä
author_facet Loippo, Teemu Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics Jyväskylän yliopisto University of Jyväskylä Loippo, Teemu Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics Jyväskylän yliopisto University of Jyväskylä
author_sort Loippo, Teemu
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description Tässä tutkielmassa suunnitellaan, valmistetaan ja kokeillaan uudenlaista suprajohde- normaalimetalli-suprajohde (SNS) lämmintintä. Uutta lämmittimessä on sen geometria, jonka on tarkoitus tehdä mittaustulosten analysoinnista helpompaa kuin aiemmin. SNS liitoksen käyttäminen lämmittimenä suprajohde-eriste-normaalimetalli-eriste- suprajohde (SINIS) liitoksen sijaan antaa suuremman tehoalueen tutkittavaksi, sillä SNS liitos on kestävämpi kuin herkkä SINIS liitos. Lisäksi SNS liitoksen etuna on se, että lämpöenergia emittoidaan koko normaalimetallista, kun taas SINIS liitokseen perustuvassa lämmittimessä suurin osa emissiosta tapahtuu tunneliliitoksen alueella. Työssä käytettiin jo aiemmista kokeista tuttua SINIS liitokseen perustuvaa lämpömittaria, mutta liitos oli hieman pienempi kuin aiemmin. SNS ja SINIS liitokset valmistettiin itsekantavan SiN kalvon päälle. Valmistusprosessien optimoinnin jälkeen SiN kalvolle valmisettu näyte mitattiin lämmittämällä kavoa ja samanaikaisesti mitaten kalvon lämpötilaa. Mittauksista saatiin selville SiN kalvon lämmönjohtuvuus, tosin ensimmäinen mitattava näyte ei ollut täydellisen onnistunut ja mittauksessa oli selviä virhelähteitä. Kaikki erot aiempiin mittauksiiin pyrittiin selittämään ja pääosin tulokset olivat samassa linjassa aiempien tulosten kanssa. Kun mittauksiin liittyvät ongelmat saatiin korjattua, olivat uudet mittaustulokset hyviä. Lisäksi lämmöjohtumisen simulaatiomalliin tehtiin muutoksia, jolloin kokeelliset tulokset sopivat lähes täydellisesti yhteen simulaation kanssa. Tulevaisuudessa vastaavanlaiset mittaukset suoritetaan ohuemmille SiN kalvoille ja fononikiderakenteille. This thesis contains the design, fabrication and initial tests for a new type of a superconductor-normal metal-superconductor (SNS) heater element. The novel part is the heater geometry, which should make the heating experiment analysis simpler than previously. Also utilizing the SNS junction as a heater instead of a superconductor-insulator-normal metal-insulator-superconductor (SINIS) junction was different compared to the previous experiments. The SNS heater allows greater power range compared to the SINIS heater, beacause SNS junctions are more robust compared to SINIS junctions. Also the heat is emitted from the normal metal, whereas in SINIS heaters most of the heat is emitted from the junction area. In this work the thermometer was a typical SINIS junction with a bit smaller dimensions than in previous experiments. SINIS and SNS junctions were fabricated on top of a suspended SiN membrane. After the fabrication processes were optimized, the thermal conductance of a SiN membrane sample was measured. The first results were promising although the data was aquired by using a non-ideal sample and non-ideal measurement setup. All differences to previously measures samples were explained. Once all issues with the measauremnts were solved the experiments were run again with good results. In addition some modifications to the simulation model were done. The experimental results agreed well with the updated simulation model. Also the heating experiment will be performed for thinner SiN membranes and for a phononic crystal structure in the future.
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Uutta l\u00e4mmittimess\u00e4 on sen geometria, jonka on tarkoitus tehd\u00e4 mittaustulosten analysoinnista helpompaa kuin aiemmin.\r\nSNS liitoksen k\u00e4ytt\u00e4minen l\u00e4mmittimen\u00e4 suprajohde-eriste-normaalimetalli-eriste-\r\nsuprajohde (SINIS) liitoksen sijaan antaa suuremman tehoalueen tutkittavaksi, sill\u00e4\r\nSNS liitos on kest\u00e4v\u00e4mpi kuin herkk\u00e4 SINIS liitos. Lis\u00e4ksi SNS liitoksen etuna on se,\r\nett\u00e4 l\u00e4mp\u00f6energia emittoidaan koko normaalimetallista, kun taas SINIS liitokseen\r\nperustuvassa l\u00e4mmittimess\u00e4 suurin osa emissiosta tapahtuu tunneliliitoksen alueella.\r\nTy\u00f6ss\u00e4 k\u00e4ytettiin jo aiemmista kokeista tuttua SINIS liitokseen perustuvaa l\u00e4mp\u00f6mittaria, mutta liitos oli hieman pienempi kuin aiemmin. SNS ja SINIS liitokset\r\nvalmistettiin itsekantavan SiN kalvon p\u00e4\u00e4lle.\r\nValmistusprosessien optimoinnin j\u00e4lkeen SiN kalvolle valmisettu n\u00e4yte mitattiin\r\nl\u00e4mmitt\u00e4m\u00e4ll\u00e4 kavoa ja samanaikaisesti mitaten kalvon l\u00e4mp\u00f6tilaa. Mittauksista\r\nsaatiin selville SiN kalvon l\u00e4mm\u00f6njohtuvuus, tosin ensimm\u00e4inen mitattava n\u00e4yte\r\nei ollut t\u00e4ydellisen onnistunut ja mittauksessa oli selvi\u00e4 virhel\u00e4hteit\u00e4. Kaikki erot\r\naiempiin mittauksiiin pyrittiin selitt\u00e4m\u00e4\u00e4n ja p\u00e4\u00e4osin tulokset olivat samassa linjassa\r\naiempien tulosten kanssa. Kun mittauksiin liittyv\u00e4t ongelmat saatiin korjattua, olivat\r\nuudet mittaustulokset hyvi\u00e4. Lis\u00e4ksi l\u00e4mm\u00f6johtumisen simulaatiomalliin tehtiin\r\nmuutoksia, jolloin kokeelliset tulokset sopivat l\u00e4hes t\u00e4ydellisesti yhteen simulaation\r\nkanssa. Tulevaisuudessa vastaavanlaiset mittaukset suoritetaan ohuemmille SiN\r\nkalvoille ja fononikiderakenteille.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "This thesis contains the design, fabrication and initial tests for a new type of a\r\nsuperconductor-normal metal-superconductor (SNS) heater element. The novel\r\npart is the heater geometry, which should make the heating experiment analysis\r\nsimpler than previously. Also utilizing the SNS junction as a heater instead of a\r\nsuperconductor-insulator-normal metal-insulator-superconductor (SINIS) junction\r\nwas different compared to the previous experiments. The SNS heater allows greater\r\npower range compared to the SINIS heater, beacause SNS junctions are more robust\r\ncompared to SINIS junctions. Also the heat is emitted from the normal metal,\r\nwhereas in SINIS heaters most of the heat is emitted from the junction area. In this\r\nwork the thermometer was a typical SINIS junction with a bit smaller dimensions\r\nthan in previous experiments. SINIS and SNS junctions were fabricated on top of a\r\nsuspended SiN membrane.\r\nAfter the fabrication processes were optimized, the thermal conductance of a SiN\r\nmembrane sample was measured. The first results were promising although the data\r\nwas aquired by using a non-ideal sample and non-ideal measurement setup. All\r\ndifferences to previously measures samples were explained. Once all issues with the\r\nmeasauremnts were solved the experiments were run again with good results. In\r\naddition some modifications to the simulation model were done. The experimental\r\nresults agreed well with the updated simulation model. Also the heating experiment\r\nwill be performed for thinner SiN membranes and for a phononic crystal structure in\r\nthe future.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by Paivi Vuorio (paelvuor@jyu.fi) on 2019-04-03T08:49:46Z\r\nNo. of bitstreams: 0", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2019-04-03T08:49:46Z (GMT). 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spellingShingle Loippo, Teemu 2D phonon thermal transport in thin SiN film SINIS thermometry SNS heater ballistic phonons SiN membrane thermal conductivity Fysiikka Physics 4021 lämmitys fononit heating (spaces) phonons
title 2D phonon thermal transport in thin SiN film
title_full 2D phonon thermal transport in thin SiN film
title_fullStr 2D phonon thermal transport in thin SiN film 2D phonon thermal transport in thin SiN film
title_full_unstemmed 2D phonon thermal transport in thin SiN film 2D phonon thermal transport in thin SiN film
title_short 2D phonon thermal transport in thin SiN film
title_sort 2d phonon thermal transport in thin sin film
title_txtP 2D phonon thermal transport in thin SiN film
topic SINIS thermometry SNS heater ballistic phonons SiN membrane thermal conductivity Fysiikka Physics 4021 lämmitys fononit heating (spaces) phonons
topic_facet 4021 Fysiikka Physics SINIS thermometry SNS heater SiN membrane ballistic phonons fononit heating (spaces) lämmitys phonons thermal conductivity
url https://jyx.jyu.fi/handle/123456789/63364 http://www.urn.fi/URN:NBN:fi:jyu-201904032052
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