| fullrecord |
[{"key": "dc.contributor.advisor", "value": "Maasilta, Ilari", "language": null, "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Heiskanen, Samuli", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2016-12-13T06:50:59Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2016-12-13T06:50:59Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2016", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.other", "value": "oai:jykdok.linneanet.fi:1644430", "language": null, "element": "identifier", "qualifier": "other", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/52280", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Tutkimuksessa kehitettiin kahden vaiheen valmistusprosessi rakorakenteen valmistamiseen, jossa on metallista valmistetut johdot. T\u00e4m\u00e4 rakorakenne on tarkoitettu l\u00e4hikent\u00e4n l\u00e4mm\u00f6nsiirtymisen mittaamiseen. Valmistus tehtiin p\u00e4\u00e4asiassa 3D-litografialla k\u00e4ytt\u00e4m\u00e4ll\u00e4 Nanoscribe Photonic Professional -j\u00e4rjestelm\u00e4\u00e4. Valmistukseen sis\u00e4ltyi my\u00f6s ALD (Atomic Layer Deposition), metallip\u00e4\u00e4llystys h\u00f6yryst\u00e4m\u00e4ll\u00e4, lift-off ja ionisuihkujyrsint\u00e4. Valmistettu rakenne koostuu kahdesta suorakulmaisesta s\u00e4rmi\u00f6st\u00e4 l\u00e4hell\u00e4 toisiaan, jotka muodostavat ripustetun yhdensuuntaisten tasojen geometrian. S\u00e4rmi\u00f6iden p\u00e4\u00e4lle tehdyt metalloinnit koostuivat ohuesta kultalangasta, joka voi toimia resistiivisen\u00e4 l\u00e4mp\u00f6mittarina ja l\u00e4mmittimen\u00e4. Valmistusprosessi kehitettiin onnistuneesti ja (1.97 \u00b1 0.05) \u00b5m leve\u00e4 rako saavutettiin. Suurimmat ongelmat valmistuksessa olivat j\u00e4nnitys 3D rakenteissa, joka rajoittaa raon kokoa, ja metalloinneille tarvitun lift-off -prosessin vaikeus. Usein rakenteet hajosivat tai ylim\u00e4\u00e4r\u00e4ist\u00e4 kultakalvoa j\u00e4i rakenteiden p\u00e4\u00e4lle. Lis\u00e4ksi tehtiin mittauksia, jotka osoittivat ett\u00e4 valmistetut langat voivat toimia l\u00e4mmittimen\u00e4 ja l\u00e4mp\u00f6mittarina suuremmissa l\u00e4mp\u00f6tiloissa kuin 25 K.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "A two-step fabrication process for a gap structure with metal wiring was developed in this study. This gap structure is meant to be used for near field heat transfer measurements. The fabrication was mostly done with 3D-lithography using a Nanoscribe Photonic Professional system. The fabrication also included ALD (Atomic Layer Deposition), metal coating by evaporation, lift-off and ion beam milling. The fabricated structure consists of two cuboids close together which form a suspended parallel plate geometry. The metallizations fabricated on the cuboids consist of a thin gold wire which can work as a resistive thermometer and a heater. The fabrication process was successfully developed and a gap size of (1.97 \u00b1 0.05) \u00b5m was reached. The biggest issues with the fabrication were the tension in the 3D structures which limits the gap size and the difficulty of the lift-off process needed for the metallizations. Very often the structures broke or extra gold film was left on the structures. Measurements were also performed, which showed that the fabricated wires can in fact work as a heater and as a thermometer down to a temperature of about 25 K.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted using Plone Publishing form by Samuli Heiskanen (sataheis) on 2016-12-13 06:50:58.399363. Form: Pro gradu -lomake (https://kirjasto.jyu.fi/julkaisut/julkaisulomakkeet/pro-gradu-lomake). JyX data: [jyx_publishing-allowed (fi) =True]", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by jyx lomake-julkaisija (jyx-julkaisija.group@korppi.jyu.fi) on 2016-12-13T06:50:59Z\nNo. of bitstreams: 2\nURN:NBN:fi:jyu-201612135056.pdf: 11542236 bytes, checksum: 753261fb7fe7aaa28892859ffa0f65de (MD5)\nlicense.html: 4822 bytes, checksum: 5847aaddc494ff7ea5e47a4d2989ba67 (MD5)", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2016-12-13T06:50:59Z (GMT). No. of bitstreams: 2\nURN:NBN:fi:jyu-201612135056.pdf: 11542236 bytes, checksum: 753261fb7fe7aaa28892859ffa0f65de (MD5)\nlicense.html: 4822 bytes, checksum: 5847aaddc494ff7ea5e47a4d2989ba67 (MD5)\n Previous issue date: 2016", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "1 verkkoaineisto (56 sivua)", "language": null, "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "Near-field", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "3D-lithography", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "nanofabrication", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "structure", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Fabrication of a gap structure for near-field heat transfer", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201612135056", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.date.updated", "value": "2016-12-13T06:51:00Z", "language": null, "element": "date", "qualifier": "updated", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": null, "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": "fi", "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4021", "language": null, "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
|