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[{"key": "dc.contributor.advisor", "value": "Johansson, Andreas", "language": null, "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Hiltunen, Vesa-Matti", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2016-04-27T14:43:26Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2016-04-27T14:43:26Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2016", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.other", "value": "oai:jykdok.linneanet.fi:1526482", "language": null, "element": "identifier", "qualifier": "other", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/49582", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "T\u00e4m\u00e4n pro gradu -tutkielman aiheena oli tutkia itsekantavien grafeenin\u00e4ytteiden\nvalmistusta. Grafeeni syntetisoitiin kaasufaasikasvatuksella ilmakeh\u00e4n paineessa kupariohutkalvoille.\nKupariohutkalvot valmistattiin k\u00e4ytt\u00e4m\u00e4ll\u00e4 elektronisuihkuh\u00f6yrystyst\u00e4.\nProjektin aikana synteesiprosessia parannettiin optimoimalla synteesiparametreja.\nSyntetisoinnin j\u00e4lkeen grafeenin\u00e4ytteet siirrettiin piinitridikalvoille, joihin oli\nvalmistettu reiki\u00e4. Viimeinen vaihe siirrossa on PMMA tukikerroksen poisto grafeenin\np\u00e4\u00e4lt\u00e4, jota tutkittiin k\u00e4ytt\u00e4m\u00e4ll\u00e4 kahta eri menetelm\u00e4\u00e4. N\u00e4ist\u00e4 ensimm\u00e4inen\nmenetelm\u00e4 oli l\u00e4mp\u00f6k\u00e4sittely ja toinen kriittisen pisteen kuivaus PMMA:n asetoniin\nliuottamisen j\u00e4lkeen. N\u00e4ytteet kuvannettiin k\u00e4ytt\u00e4m\u00e4ll\u00e4 pyyhk\u00e4isyelektronimikroskopiaa,\nl\u00e4p\u00e4isyelektronimikroskopiaa sek\u00e4 optista mikroskopiaa. Lis\u00e4ksi n\u00e4ytteet\nkarakterisoitiin k\u00e4ytt\u00e4m\u00e4ll\u00e4 Raman spektroskopiaa. Ty\u00f6n tuloksena alun synteesiongelmien\nj\u00e4lkeen itsekantavaa grafeenia valmistettiin onnistuneesti. Eri PMMA:n poistomenetelmist\u00e4\nl\u00e4mp\u00f6k\u00e4sittely toimi monikerroksiselle grafeenille, mutta yksikerroksinen\ngrafeeni ei selvinnyt k\u00e4sittelyst\u00e4. Kriittisen pisteen kuivaus toimi molemmissa\ntapauksissa, mutta j\u00e4tti ep\u00e4puhtauksia, joten parhaaksi menetelm\u00e4ksi selvisi PMMA:\nn poisto k\u00e4ytt\u00e4m\u00e4ll\u00e4 kriittisen pisteen kuivausta ja n\u00e4ytteiden puhdistus t\u00e4m\u00e4n\nj\u00e4lkeen k\u00e4ytt\u00e4m\u00e4ll\u00e4 l\u00e4mp\u00f6k\u00e4sittely\u00e4.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "In this Master\u2019s thesis the production of suspended graphene devices was studied.\nGraphene was synthesized using atmospheric pressure chemical vapor deposition onto\ncopper thin films that were fabricated using electron beam evaporation. During the\nproject, the synthesis process was improved by optimizing synthesis parameters. After\nsynthesis graphene samples were transferred onto silicon nitride membranes, which\nhad openings fabricated to them. The last step of the transfer was removal of PMMA\nsupport layer from graphene, which was studied using two different methods. First\nof these was thermal annealing and the second critical point drying after dissolving\nthe PMMA with acetone. Samples were imaged using scanning electron microscopy,\ntransmission electron microscopy and optical microscopy. Further characterization\nwas done with Raman spectroscopy. As for results, after some struggle with synthesis,\nsuspended graphene was successfully fabricated. As for different PMMA cleaning\nmethods, thermal annealing worked with multilayer graphene, but caused single layer\ngraphene to break. Critical point drying worked in both cases, but left residues, so\nbest method ended up being PMMA removal by critical point drying followed by\ncleaning of graphene by annealing.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted using Plone Publishing form by Vesa-Matti Hiltunen (vejuhilt) on 2016-04-27 14:43:07.740084. Form: Pro gradu -lomake (https://kirjasto.jyu.fi/julkaisut/julkaisulomakkeet/pro-gradu-lomake). JyX data: [jyx_publishing-allowed (fi) =True]", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by jyx lomake-julkaisija (jyx-julkaisija.group@korppi.jyu.fi) on 2016-04-27T14:43:26Z\nNo. of bitstreams: 2\nURN:NBN:fi:jyu-201604272345.pdf: 159716838 bytes, checksum: 3eb5c0abbc98e1675e0c7b4e45d64de3 (MD5)\nlicense.html: 4805 bytes, checksum: 7aafd77c75764d2809df8b8ef8984448 (MD5)", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2016-04-27T14:43:26Z (GMT). No. of bitstreams: 2\nURN:NBN:fi:jyu-201604272345.pdf: 159716838 bytes, checksum: 3eb5c0abbc98e1675e0c7b4e45d64de3 (MD5)\nlicense.html: 4805 bytes, checksum: 7aafd77c75764d2809df8b8ef8984448 (MD5)\n Previous issue date: 2016", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "1 verkkoaineisto (66 s.)", "language": null, "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "graphene", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "CVD", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "Raman spectroscopy", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "suspended graphene", "language": null, "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Suspended graphene device fabrication", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201604272345", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Soveltava fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Applied Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.date.updated", "value": "2016-04-27T14:43:27Z", "language": null, "element": "date", "qualifier": "updated", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": null, "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": "fi", "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4023", "language": null, "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.subject.yso", "value": "grafeeni", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "ohutkalvot", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
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