| fullrecord |
[{"key": "dc.contributor.advisor", "value": "Honkala, Karoliina", "language": null, "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.advisor", "value": "Sajavaara, Timo", "language": null, "element": "contributor", "qualifier": "advisor", "schema": "dc"}, {"key": "dc.contributor.author", "value": "Linnera, Jarno", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2014-12-16T12:59:37Z", "language": null, "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2014-12-16T12:59:37Z", "language": null, "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2014", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.other", "value": "oai:jykdok.linneanet.fi:1453905", "language": null, "element": "identifier", "qualifier": "other", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/44909", "language": null, "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Tutkielmassa k\u00e4yd\u00e4\u00e4n lyhyesti l\u00e4pi atomikerroskasvatuksen historia, mit\u00e4 se on ja sivutaan my\u00f6s sen k\u00e4ytt\u00f6kohteita. Atomikerroskasvatus on teollisessa mittakaavassa merkitt\u00e4v\u00e4 sovellus ja sen k\u00e4ytt\u00f6kohteiden m\u00e4\u00e4r\u00e4 kasvaa entisest\u00e4\u00e4n. P\u00e4\u00e4osin keskityt\u00e4\u00e4n kahden yleisimmin k\u00e4ytetyn yhdisteen, alumiinioksidin Al2O3 ja hafniumoksidin HfO2, kasvatukseen, niiden reaktiomekanismeihin ja siihen kuinka reaktiomekanismit on saatu selville. Kronologinen l\u00e4pileikkaus alkaen ensimm\u00e4isist\u00e4 tehdyist\u00e4 reaktioista aina viimeisimpiin ominaisuuksien selvitt\u00e4mist\u00e4 koskeviin ja atomitason reaktioita kuvaaviin tutkimustuloksiin antaa yleiskuvan siit\u00e4 kuinka monipuolisesta teknologiasta on kysymys. Tutkielmassa korostuu my\u00f6s laskennallisen ja kokeellisen datan yhteensovittamisen t\u00e4rkeys ja se, miten paljon tutkimusty\u00f6t\u00e4 joudutaan tekem\u00e4\u00e4n, jotta saadaan edes jossain m\u00e4\u00e4rin tarkka kuva siit\u00e4, mit\u00e4 pinnalla tapahtuu kun kaksi l\u00e4ht\u00f6ainetta reagoi kesken\u00e4\u00e4n per\u00e4kk\u00e4isiss\u00e4 sykleiss\u00e4. Laskennallinen tutkimus nousee tutkielmassa hieman vahvemmin esiin. P\u00e4\u00e4paino on alumiinioksidille ja hafniumoksidille suoritetuissa laskuissa tiheysfunktionaaliteorialla. Tutkielman lopussa on oma kappaleensa muille laskennallisille menetelmille kuin ab initio, keskittyen siihen miten niit\u00e4 on k\u00e4ytetty atomikerroskasvatuksen tutkimiseen.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted using Plone Publishing form by Jarno Linnera (javeheli) on 2014-12-16 12:59:36.725805. Form: Pro gradu -lomake (https://kirjasto.jyu.fi/julkaisut/julkaisulomakkeet/pro-gradu-lomake). JyX data: [jyx_publishing-allowed (fi) =True]", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by jyx lomake-julkaisija (jyx-julkaisija@noreply.fi) on 2014-12-16T12:59:37Z\nNo. of bitstreams: 2\nURN:NBN:fi:jyu-201412163517.pdf: 3159901 bytes, checksum: b9b0bf1eeb08fa3cde4fceed703bb43d (MD5)\nlicense.html: 4806 bytes, checksum: 78a4ffc1b5c627afac75936dd110850a (MD5)", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2014-12-16T12:59:37Z (GMT). No. of bitstreams: 2\nURN:NBN:fi:jyu-201412163517.pdf: 3159901 bytes, checksum: b9b0bf1eeb08fa3cde4fceed703bb43d (MD5)\nlicense.html: 4806 bytes, checksum: 78a4ffc1b5c627afac75936dd110850a (MD5)\n Previous issue date: 2014", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "1 verkkoaineisto (57 sivua)", "language": null, "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "fin", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "atomikerroskasvatus", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "ALD", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "laskennallinen kemia", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "IR-spektroskopia", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Atomikerroskasvatuksen ymm\u00e4rrys molekyylitasolla", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201412163517", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Kemian laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Chemistry", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysikaalinen kemia", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Physical Chemistry", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.date.updated", "value": "2014-12-16T12:59:38Z", "language": null, "element": "date", "qualifier": "updated", "schema": "dc"}, {"key": "yvv.contractresearch.funding", "value": "0", "language": null, "element": "contractresearch", "qualifier": "funding", "schema": "yvv"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": "fi", "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4032", "language": null, "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.subject.yso", "value": "atomikerroskasvatus", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "laskennallinen kemia", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "spektroskopia", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
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