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[{"key": "dc.contributor.author", "value": "H\u00e4nninen, Tuomas", "language": null, "element": "contributor", "qualifier": "author", "schema": "dc"}, {"key": "dc.date.accessioned", "value": "2013-09-10T06:43:10Z", "language": "", "element": "date", "qualifier": "accessioned", "schema": "dc"}, {"key": "dc.date.available", "value": "2013-09-10T06:43:10Z", "language": "", "element": "date", "qualifier": "available", "schema": "dc"}, {"key": "dc.date.issued", "value": "2013", "language": null, "element": "date", "qualifier": "issued", "schema": "dc"}, {"key": "dc.identifier.other", "value": "oai:jykdok.linneanet.fi:1279554", "language": null, "element": "identifier", "qualifier": "other", "schema": "dc"}, {"key": "dc.identifier.uri", "value": "https://jyx.jyu.fi/handle/123456789/42120", "language": "", "element": "identifier", "qualifier": "uri", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Thermal conductivity of the constituent materials is one of the most important properties affecting the performance of micro- and nanofabricated devices. These devices often make use of thin films with thicknesses ranging from some nanometers to few micrometers. The thermal conductivity of thin films can be measured with the three-omega method. In three-omega technique a metal wire acting as a resistive heater is microfabricated on the sample. Alternating current passing through the metal heater at a frequency \u03c9 heats the sample periodically and generates oscillations in the resistance of the metal line at a frequency 2\u03c9. The oscillating resistance component is coupled with the driving current to create a third harmonic (3\u03c9) voltage component over the heater. The magnitude and frequency dependence of the 3\u03c9 voltage can be used to obtain the thermal properties of the sample.\r\nThe measurement setup consisted of a vacuum chamber with a custom sample mount, lock-in amplifiers to supply the voltage and to record the output, and various other electrical components. Custom LabVIEW programs were used for data acquisition and input signal modification.\r\nThe goal of the project was to build and validate a 3\u03c9-measurement setup by measuring the thermal conductivities of 300 nm thick SiO2 thin films. Bismuth and gold were used as the heater materials because they have noticeable temperature coeffcients of resistivity, bismuth even at temperatures of a few kelvin. Data analysis revealed that the output of the examined measurement setups can not be used to calculate the thermal properties of the samples. This is most probably due to spurious 3\u03c9-signal in the measurement circuit, originating from the components and voltage sources.", "language": "en", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.abstract", "value": "Valmistusaineiden l\u00e4mm\u00f6njohtavuus on yksi t\u00e4rkeimmist\u00e4 mikro- ja nanovalmistettujen laitteiden toimintaan vaikuttavista ominaisuuksista. Usein n\u00e4iss\u00e4 laitteissa materiaaleja k\u00e4ytet\u00e4\u00e4n ohuina kerroksina tai kalvoina, joiden paksuus voi vaihdella muutamista nano- metreist\u00e4 muutamiin mikrometreihin. Ohutkalvojen l\u00e4mm\u00f6njohtavuutta voidaan mitata kolme-omega-menetelm\u00e4ll\u00e4. Kolme-omega-menetelm\u00e4ss\u00e4 n\u00e4ytteen pinnalle valmistettu metallijohdin toimii resistiivisen\u00e4 l\u00e4mmittimen\u00e4. Metallil\u00e4mmittimen l\u00e4pi taajuudella \u03c9 kulkeva vaihtovirta l\u00e4mmitt\u00e4\u00e4 metallia jaksollisesti ja aiheuttaa oskillaatioita metallilangan resistanssissa taajuudella 2\u03c9. Oskilloiva resistanssikomponentti yhdess\u00e4 langan l\u00e4pi kulkevan virran kanssa aiheuttaa 3\u03c9-taajuisen j\u00e4nnitekomponentin langan p\u00e4iden v\u00e4lille. \r\nT\u00e4m\u00e4n 3\u03c9-j\u00e4nnitteen suuruutta ja taajuusriippuvuutta voidaan k\u00e4ytt\u00e4\u00e4 n\u00e4ytteen termisten ominaisuuksien m\u00e4\u00e4ritt\u00e4miseen.\r\nMittausj\u00e4rjestely koostui tyhji\u00f6kammiosta ja r\u00e4\u00e4t\u00e4l\u00f6idyst\u00e4 n\u00e4ytea- lustasta, tarvittavista s\u00e4hk\u00f6isist\u00e4 komponenteista ja lukitusvahvisti- mista, joilla sy\u00f6tettiin piiriin vaihtoj\u00e4nnite ja mitattiin saatu ulostulos- ignaali. Datankeruu ja sy\u00f6tt\u00f6signaalin ohjaus suoritettiin erityisill\u00e4 LabVIEW-ohjelmilla.\r\nProjektin tarkoituksena oli rakentaa ja validoida kolme-omega- mittausj\u00e4rjestely mittaamalla 300 nanometri\u00e4 paksujen piidioksidi- kalvojen l\u00e4mm\u00f6njohtavuuksia. Vismuttia ja kultaa kokeiltiin l\u00e4mmitinlangan materiaalina, koska niill\u00e4 on huomattava resistiivisyyden l\u00e4mp\u00f6tilavaste, vismutilla aina muutaman kelvinin l\u00e4mp\u00f6tiloihin as- ti. Data-analyysi paljasti, ett\u00e4 saatua mittausdataa ei voida k\u00e4ytt\u00e4\u00e4 n\u00e4ytteiden l\u00e4mp\u00f6ominaisuuksien m\u00e4\u00e4ritt\u00e4miseen. Syy t\u00e4lle on todenn\u00e4k\u00f6isesti mittauspiirist\u00e4 ja signaalil\u00e4hteist\u00e4 aiheutuva h\u00e4iri\u00f6signaali.", "language": "fi", "element": "description", "qualifier": "abstract", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted using Plone Publishing form by Tuomas H\u00e4nninen (jutuhann) on 2013-09-10 06:43:09.774260. Form: Pro gradu -lomake (1 tekij\u00e4) (https://kirjasto.jyu.fi/julkaisut/julkaisulomakkeet/pro-gradu-lomake-1-tekijae). JyX data:", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Submitted by jyx lomake-julkaisija (jyx-julkaisija@noreply.fi) on 2013-09-10T06:43:10Z\r\nNo. of bitstreams: 2\r\nURN:NBN:fi:jyu-201309102266.pdf: 3919983 bytes, checksum: e538034b42de65f8d3af35b2b42e9a6f (MD5)\r\nlicense.html: 107 bytes, checksum: a7d86e598caa500b1b433bbb9dc8ef1c (MD5)", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.description.provenance", "value": "Made available in DSpace on 2013-09-10T06:43:10Z (GMT). No. of bitstreams: 2\r\nURN:NBN:fi:jyu-201309102266.pdf: 3919983 bytes, checksum: e538034b42de65f8d3af35b2b42e9a6f (MD5)\r\nlicense.html: 107 bytes, checksum: a7d86e598caa500b1b433bbb9dc8ef1c (MD5)\r\n Previous issue date: 2013", "language": "en", "element": "description", "qualifier": "provenance", "schema": "dc"}, {"key": "dc.format.extent", "value": "1 verkkoaineisto.", "language": null, "element": "format", "qualifier": "extent", "schema": "dc"}, {"key": "dc.format.mimetype", "value": "application/pdf", "language": null, "element": "format", "qualifier": "mimetype", "schema": "dc"}, {"key": "dc.language.iso", "value": "eng", "language": null, "element": "language", "qualifier": "iso", "schema": "dc"}, {"key": "dc.rights", "value": "In Copyright", "language": "en", "element": "rights", "qualifier": null, "schema": "dc"}, {"key": "dc.subject.other", "value": "thermal conductivity", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "thin film", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "3-omega", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.subject.other", "value": "heat transport", "language": "", "element": "subject", "qualifier": "other", "schema": "dc"}, {"key": "dc.title", "value": "Implementing the 3-omega technique for thermal conductivity measurements", "language": null, "element": "title", "qualifier": null, "schema": "dc"}, {"key": "dc.type", "value": "master thesis", "language": null, "element": "type", "qualifier": null, "schema": "dc"}, {"key": "dc.identifier.urn", "value": "URN:NBN:fi:jyu-201309102266", "language": null, "element": "identifier", "qualifier": "urn", "schema": "dc"}, {"key": "dc.type.dcmitype", "value": "Text", "language": "en", "element": "type", "qualifier": "dcmitype", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Pro gradu -tutkielma", "language": "fi", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.type.ontasot", "value": "Master\u2019s thesis", "language": "en", "element": "type", "qualifier": "ontasot", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Matemaattis-luonnontieteellinen tiedekunta", "language": "fi", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.faculty", "value": "Faculty of Sciences", "language": "en", "element": "contributor", "qualifier": "faculty", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Fysiikan laitos", "language": "fi", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.department", "value": "Department of Physics", "language": "en", "element": "contributor", "qualifier": "department", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "University of Jyv\u00e4skyl\u00e4", "language": "en", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.contributor.organization", "value": "Jyv\u00e4skyl\u00e4n yliopisto", "language": "fi", "element": "contributor", "qualifier": "organization", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Fysiikka", "language": "fi", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.subject.discipline", "value": "Physics", "language": "en", "element": "subject", "qualifier": "discipline", "schema": "dc"}, {"key": "dc.date.updated", "value": "2013-09-10T06:43:10Z", "language": "", "element": "date", "qualifier": "updated", "schema": "dc"}, {"key": "dc.type.coar", "value": "http://purl.org/coar/resource_type/c_bdcc", "language": null, "element": "type", "qualifier": "coar", "schema": "dc"}, {"key": "dc.rights.accesslevel", "value": "openAccess", "language": "fi", "element": "rights", "qualifier": "accesslevel", "schema": "dc"}, {"key": "dc.type.publication", "value": "masterThesis", "language": null, "element": "type", "qualifier": "publication", "schema": "dc"}, {"key": "dc.subject.oppiainekoodi", "value": "4021", "language": null, "element": "subject", "qualifier": "oppiainekoodi", "schema": "dc"}, {"key": "dc.subject.yso", "value": "l\u00e4mm\u00f6n johtuminen", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.subject.yso", "value": "fysiikka", "language": null, "element": "subject", "qualifier": "yso", "schema": "dc"}, {"key": "dc.format.content", "value": "fulltext", "language": null, "element": "format", "qualifier": "content", "schema": "dc"}, {"key": "dc.rights.url", "value": "https://rightsstatements.org/page/InC/1.0/", "language": null, "element": "rights", "qualifier": "url", "schema": "dc"}, {"key": "dc.type.okm", "value": "G2", "language": null, "element": "type", "qualifier": "okm", "schema": "dc"}]
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