Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system

Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes by a Raman acquisition setup. Microchannels where fabricated in sodalime glass s...

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Main Author: Rojas Rojas, Laura
Other Authors: Matemaattis-luonnontieteellinen tiedekunta, Faculty of Sciences, Fysiikan laitos, Department of Physics, University of Jyväskylä, Jyväskylän yliopisto
Format: Master's thesis
Language:eng
Published: 2012
Subjects:
Online Access: https://jyx.jyu.fi/handle/123456789/40519
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author Rojas Rojas, Laura
author2 Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics University of Jyväskylä Jyväskylän yliopisto
author_facet Rojas Rojas, Laura Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics University of Jyväskylä Jyväskylän yliopisto Rojas Rojas, Laura Matemaattis-luonnontieteellinen tiedekunta Faculty of Sciences Fysiikan laitos Department of Physics University of Jyväskylä Jyväskylän yliopisto
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description Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes by a Raman acquisition setup. Microchannels where fabricated in sodalime glass substrate by MeV ion beam lithography or electron beam lithography and wet etching. Fusion bonding (550 °C) was used to seal the microchannels. As a result a prototype microfluidic device with 1.6 µm deep channel that exhibit efficient sealing and suitable channel geometry was obtained. The microfluidic device was tested in a Raman spectroscopy detection system and the collected spectra showed the presence of carbon nanotubes within the channel with clear RBM and G-band peaks. By this approach a practical and simple fabrication technique for microfluidic devices combined with Raman spectroscopy was done. This device can be enhanced to perform concentration maps within the channel and further research can focus on performing steady constant fluid flow inside the channel.
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spellingShingle Rojas Rojas, Laura Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system microfluidics thermal bonding lithography wet etching Raman spectroscopy Fysiikka Physics 4021 spektroskopia fysiikka nesteet
title Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_full Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_fullStr Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_full_unstemmed Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_short Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_sort fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
title_txtP Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
topic microfluidics thermal bonding lithography wet etching Raman spectroscopy Fysiikka Physics 4021 spektroskopia fysiikka nesteet
topic_facet 4021 Fysiikka Physics Raman spectroscopy fysiikka lithography microfluidics nesteet spektroskopia thermal bonding wet etching
url https://jyx.jyu.fi/handle/123456789/40519 http://www.urn.fi/URN:NBN:fi:jyu-201212043291
work_keys_str_mv AT rojasrojaslaura fabricationtechniquesfordevelopingafunctionalmicrofluidicglassdevicesuitableford