APA (7th ed.) Citation

Napari, M. (2017). Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films.

Chicago Style (17th ed.) Citation

Napari, Mari. Low-temperature Thermal and Plasma-enhanced Atomic Layer Deposition of Metal Oxide Thin Films. Jyväskylä, 2017.

MLA (9th ed.) Citation

Napari, Mari. Low-temperature Thermal and Plasma-enhanced Atomic Layer Deposition of Metal Oxide Thin Films. 2017.

Warning: These citations may not always be 100% accurate.