Development of MeV ion beam lithography technique for microfluidic applications
| Main Author: | |
|---|---|
| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2011.
|
| Series: | Research report / Department of Physics, University of Jyväskylä,
no. 3/2011. |
| Subjects: | |
| Online Access: | http://urn.fi/URN:ISBN:978-951-39-4267-0 |
Search Result 1
Development of MeV ion beam lithography technique for microfluidic applications
Published 2011
Doctoral dissertation