MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics
| Main Author: | |
|---|---|
| Format: | Doctoral dissertation |
| Language: | eng |
| Published: |
Jyväskylä :
2008.
|
| Series: | Research report / Department of Physics, University of Jyväskylä,
9/2008. |
| Subjects: | |
| Online Access: | http://urn.fi/URN:ISBN:978-951-39-3318-0 |
Table of Contents:
- Vain tiivistelmäosa