MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

Bibliographic Details
Main Author: Gorelick, Sergey
Format: Doctoral dissertation
Language:eng
Published: Jyväskylä : 2008.
Series:Research report / Department of Physics, University of Jyväskylä, 9/2008.
Subjects:
Online Access:http://urn.fi/URN:ISBN:978-951-39-3318-0

MARC

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