Fabrication of a suspended carbon nanotube nanomechanical device via e-beam lithography
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| Format: | Master's thesis |
| Language: | eng |
| Published: |
Jyväskylä,
2008.
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| Online Access: | https://jyu.finna.fi/Record/jykdok.1055245 |
| Physical Description: | 5, 83 lehteä |
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