Development of negative ion sources for accelerator, fusion and semiconductor manufacturing applications

Bibliographic Details
Main Author: Hahto, Sami
Format: Doctoral dissertation
Language:eng
Published: Jyväskylä : 2003.
Series:Research report / Department of Physics, University of Jyväskylä, no. 4/2003.
Online Access:http://urn.fi/URN:ISBN:978-951-39-3142-1
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Development of negative ion sources for accelerator, fusion and semiconductor manufacturing applications by Hahto, Sami

Published 2003
Doctoral dissertation