Development of negative ion sources for accelerator, fusion and semiconductor manufacturing applications
Main Author: | |
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Format: | Doctoral dissertation |
Language: | eng |
Published: |
Jyväskylä :
2003.
|
Series: | Research report / Department of Physics, University of Jyväskylä,
no. 4/2003. |
Online Access: | http://urn.fi/URN:ISBN:978-951-39-3142-1 |
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Development of negative ion sources for accelerator, fusion and semiconductor manufacturing applications
Published 2003
Doctoral dissertation