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    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics by Gorelick, Sergey

    Published 2008
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    Doctoral dissertation
  2. 2
    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

    MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics by Gorelick, Sergey

    Published 2008
    Doctoral dissertation
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